Nanogrowth

Electronical, optical, magnetical and tribological properties in nanostructured functional layers are dominated by the layer surface. Therefore, the investigation of the surface morphology including the underlying atomic and molecular diffusion processes becomes a major task in nano-structural research. In the past, it showed that it was not sufficient any more to undergo a full-size analysis of the surface morphology on the nanometer scale after the layer deposition or modification with state-of-the-art microscopy and scattering methods. In order to optimize the structural property relations of functional layers the acurate knowledge of the processes during the layer growth is essential. These processes can be determined with in situ characterization methodes, meaning during the layer deposition itself.